Ion Irradiation Facilities – Type M

The compact D.I.S Germany Ion Irradiation and Implantation Facilities Type-M are based on a versatile Electron Cyclotron Resonance Ion Source (ECRIS) which is offered with a Wien filter for charge and mass separation of the extracted ion beam.

The product is aimed to users in research and development, but also for industrial applications, providing the irradiation and implantation of ions in samples of up to 25 mm in size and higher (on request).

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Industrielle Maschinenanlage mit blauen D.I.S-Logos, silberfarben, zahlreiche Rohre und Ventile.
Product number
902-S7-09-00003
Type of source
ECR (Electron Cyclotron Resonance)
Particle separation
Wien Filter
Datasheet
data_sheet_irradiation_implantation_facilityDownload
Video
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Special features
  • ECRIS with a compact Wien filter for low to intermediate ion beam currents of several hundreds of microamps
  • Facility is offered with horizontal ion beam orientation
  • Vertical ion beam configurations are possible on demand