The compact D.I.S Germany Ion Irradiation and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS). The exctracted high-current ion beam is charge and mass analyzed via a magnetic dipole and can be used for further applications either in a connected D.I.S target chamber or in a downstream-connected customer beamline.
The product is aimed to users in research and development as well as for industrial applications, providing ion beams up to mA beam current
- Type of source
- ECR (Electron Cyclotron Resonance)
- Particle separation
- Dipole
- Special features
- ECRIS with a magnetic dipole for ion beam currents up to emA
- Facility is offered in different ion beam orientation configurations:
- horizontal beam guiding
- vertical bottom-top beam guiding
- vertical top-bottom beam guiding