1. Ion Irradiation Facilities | Type L

    The compact D.I.S Germany Ion Irradiation and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS). The extracted high-current ion beam is charged and mass analyzed via a magnetic dipole. It can then be used for further applications in either a connected D.I.S. target chamber or a downstream-connected customer beamline.This product is intended […]

    Type of source
    ECR (Electron Cyclotron Resonance)
    Particle separation
    Dipole
  2. Ion Irradiation Facilities | Type M

    The compact D.I.S Germany Ion Irradiation and Implantation Facilities Type-M are based on a versatile Electron Cyclotron Resonance Ion Source (ECRIS), which is equipped with a Wien filter that separates the extracted ion beam by charge and mass. This product is intended for users in research and development as well as for industrial applications. It […]

    Product number
    902-S7-09-00003
    Type of source
    ECR (Electron Cyclotron Resonance)
    Particle separation
    Wien Filter