Ion Irradiation Facilities | Type L
The compact D.I.S Germany Ion Irradiation and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS). The extracted high-current ion beam is charged and mass analyzed via a magnetic dipole. It can then be used for further applications in either a connected D.I.S. target chamber or a downstream-connected customer beamline.This product is intended […]
- Type of source
- ECR (Electron Cyclotron Resonance)
- Particle separation
- Dipole
- Datasheet