1. Ion Irradiation Facilities – Type M

    The compact D.I.S Germany Ion Irradiation and Implantation Facilities Type-M are based on a versatile Electron Cyclotron Resonance Ion Source (ECRIS) which is offered with a Wien filter for charge and mass separation of the extracted ion beam. The product is aimed to users in research and development, but also for industrial applications, providing the […]

    Product number
    902-S7-09-00003
    Type of source
    ECR (Electron Cyclotron Resonance)
    Particle separation
    Wien Filter
    Special features
    • ECRIS with a compact Wien filter for low to intermediate ion beam currents of several hundreds of microamps
    • Facility is offered with horizontal ion beam orientation
    • Vertical ion beam configurations are possible on demand
  2. Customized Irradiation Facilities

    D.I.S customizes ion irradiation facilities for the characterization of ion sources, ion optics, ion diagnostics as well as ion analytics. Due to the highly modularized design of the facility components, easy exchange of beamline elements for testing and ion irradiation purposes is possible. Therefore, it can be adapted to a wide range of applications.

    Type of source
    ECR (Electron Cyclotron Resonance)
    Particle separation
    Wien Filter, Dipole
    Special features
    • Customizable Components: Most parts can be tailored to specific requirements, ensuring seamless integration into existing installations.
    • High Adaptability: The setup is highly flexible and can be combined with or adapted to customer-specific components.
    • Comprehensive Solutions: Combines advanced ion sources (e.g., D.I.S EBIS C-1, D.I.S ECRIS-2.45), charged particle beam optics (e.g., electrostatic deflectors, Einzel lenses), diagnostics (e.g., Faraday cups, aperture systems), and analytics (e.g., Wien filter, electromagnetic dipole) for versatile ion irradiation and testing applications.
  3. Ion Irradiation Facilities – Type L

    The compact D.I.S Germany Ion Irradiation and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS). The exctracted high-current ion beam is charge and mass analyzed via a magnetic dipole and can be used for further applications either in a connected D.I.S target chamber or in a downstream-connected customer beamline. The product is […]

    Type of source
    ECR (Electron Cyclotron Resonance)
    Particle separation
    Dipole
    Special features
    • ECRIS with a magnetic dipole for ion beam currents up to emA
    • Facility is offered in different ion beam orientation configurations:
      • horizontal beam guiding
      • vertical bottom-top beam guiding
      • vertical top-bottom beam guiding
  4. Customized Irradiation Facilities

    D.I.S customizes ion irradiation facilities for the characterization of ion sources, ion optics, ion diagnostics as well as ion analytics. Due to the highly modularized design of the facility components, easy exchange of beamline elements for testing and ion irradiation purposes is possible. Therefore, it can be adapted to a wide range of applications.

    Type of source
    ECR (Electron Cyclotron Resonance)
    Particle separation
    Wien Filter, Dipole
    Special features
    • Customizable Components: Most parts can be tailored to specific requirements, ensuring seamless integration into existing installations
    • High Adaptability: The setup is highly flexible and can be combined with or adapted to customer-specific components.
    • Comprehensive Solutions: Combines advanced ion sources (e.g., D.I.S EBIS C-1, D.I.S ECRIS-2.45), charged particle beam optics (e.g., electrostatic deflectors, Einzel lenses), diagnostics (e.g., Faraday cups, aperture systems), and analytics (e.g., Wien filter, electromagnetic dipole) for versatile ion irradiation and testing applications.