Ion Irradiation Facilities – Type M
The compact D.I.S Germany Ion Irradiation and Implantation Facilities Type-M are based on a versatile Electron Cyclotron Resonance Ion Source (ECRIS) which is offered with a Wien filter for charge and mass separation of the extracted ion beam. The product is aimed to users in research and development, but also for industrial applications, providing the […]
- Product number
- 902-S7-09-00003
- Type of source
- ECR (Electron Cyclotron Resonance)
- Particle separation
- Wien Filter
- Video
- Special features
- ECRIS with a compact Wien filter for low to intermediate ion beam currents of several hundreds of microamps
- Facility is offered with horizontal ion beam orientation
- Vertical ion beam configurations are possible on demand