D.I.S-cover ARIS! Our new TOF time-of-flight mass spectrometer analyses residual gases and process gases with maximum precision. This Advanced Residual Gas Inspection System is a user-friendly device that facilitates rapid process and residual gas analysis.
Potential Applications
Pharma, chemical and food industry, petrochemistry
The utilization of ARIS within various domains, including pharmaceuticals, chemicals and food processing, is conducive to the enhancement of quality control and process optimization. A fundamental principle underpinning this approach is the prevention of contamination. Furthermore, the tool enables technical gas analyses for refineries, petrochemicals, natural gas and renewable fuels, as well as comprehensive analyses of process and residual gases.
Aerospace industry
ARIS provides also support to the aerospace industry through a range of applications, including the domains of satellite manufacturing, space research and the analysis of breathing air for the benefit of astronauts.
Equipment manufacturers
ARIS constitutes a valuable asset for equipment manufacturers in the vacuum industry. This is due to the fact that it offers enhanced process and residual gas control capabilities. These capabilities are also essential for the microelectronics and semiconductor industries.
Medicine, health and environment
The ARIS system is designed for use in research and diagnostic laboratories. Breath analysis serves as a valuable tool across multiple professional domains, such as medicine, fitness, and the early detection of other diseases. Additionally, ARIS supports environmental monitoring and regulation, enabling research in biotechnology and environmental sciences. ARIS can also deliver services to industry and government agencies, including workplace monitoring.

Working principle
The ARIS analyzer uses time-of-flight mass spectrometry to measure residual and process gases from 1 to 200 amu. Atoms and molecules are ionized by electron impact and separated by mass according to their flight time. With a unique ion pulsing technology, ARIS avoids timing uncertainties and delivers full mass spectra in every measurement, showing gas composition and relative abundances in real time.
Conclusions
ARIS – that’s mean full mass range with every measurement, fast, precise gas analysis and reliable residual gas and process gas monitoring. The use of the spectrometer guarantees high efficiency, safety and more understanding of your vacuum processes. Get in contact with us – our team is ready to provide advice on your ideas and collaborate with you to bring your concepts to life.