ECRIS

The D.I.S ECRIS-2.45 is an electron cyclotron resonance ion source (ECRIS) optimized for the production of ion beam currentsofuptoseveralhundreds ofmicroamperesforawiderange ofelements. Themodularandoperator-friendly D.I.SECRIS-2.45issuitableforuse inawide variety of applications for basic research in various scientificdisciplines, for teaching andtraining,andfortechnological applications.

Industrielle Maschine, silberfarben, komplexe Bauteile, auf Schienen montiert, keine Personen.
Product number
913-S7-09-00001
Type of source
CF100
Flange
CF100
Ion current
<10mA
Final energy
<20kV
Energy feed
microwave generator
Special features
  • Compact Electron Cyclotron Resonance Ion Source (ECRIS) with DN100CF beamline interface flange
  • RF injection chamber with two DN16CF support flanges for gas inlet and optional diagnostics
  • Gas inlet compatible with any gaseous elements and compounds
  • 2.45 GHz RF antenna with Type-N connector
  • Moveable magnet system for optimization of the “minimum B-configuration” (optional motorized positioning system for in-situ adjustment)
  • Multi-electrode extraction system with high-voltage feedthroughs and additional interface ports for vacuum gauge, vacuum pump, and beamline connection
  • Ion energy adjustable from 1 kV to 50 kV × q (two-stage acceleration) or 5 kV to 20 kV × q (single-stage acceleration)