The compact D.I.S Germany Ion Irradiation and Implantation Facilities operate a versatile Electron Cyclotron Resonance Ion Source (ECRIS). The extracted high-current ion beam is charged and mass analyzed via a magnetic dipole. It can then be used for further applications in either a connected D.I.S. target chamber or a downstream-connected customer beamline.
This product is intended for users in research and development, as well as for industrial applications. It provides ion beams with a current of up to mA.
- Type of source
- ECR (Electron Cyclotron Resonance)
- Particle separation
- Dipole
- Datasheet
- Special features
- ECRIS with a magnetic dipole for ion beam currents up to emA
- Facility is offered in different ion beam orientation configurations:
- Horizontal beam guiding
- Vertical bottom-top beam guiding
- Vertical top-bottom beam guiding