Aperture system

Aperture systems are an ion beam diagnostic tool for cropping or blanking the charged particle beam. The system is designed for power loads of up to 15 W and suitable for a wide pressure range down to ultra-high vacuum (UHV) conditions. The size of the aperture can be individually chosen.

Custom Solutions

Aperture system option.

Custom Solutions

We offer development of custom solutions to perfectly suit your implementation.

Special features

  • aperture sizes and dimensions depending on your requirements

  • mounted to a linear feedthrough in order to enable positioning into and out of the beam

  • optionally highly sputter resistant materials (e.g. tungsten) are available and recommended for use with beams of heavy and/or highly energetic ions

  • optional readout of charged particle currents on the aperture system with insulated aperture option and electrical feedthrough option


maximum beam power

  • up to 15 W with passive cooling;
  • higher beam power possible with active cooling
pressure operating range down to 1·10-10 mbar
travel length
  • 50 mm up to 200 mm
  • fixed
  • costumer specific
mounting flange
  • DN16 CF up to DN200 CF
  • customer specific
maximum bakeout temperature 150 °C
approx. box size (length x width x height) 210 mm x 152 mm x 410 mm for DN100 CF flange

Optional Supplementing Devices:

  • current measurement device for all dimensions of electric current, starting at pA

  • active cooling system for higher thermal loads

  • optional extension to multi-jaw slit system