A neutral particle filter allows the removal of neutral particles from a particle beam. This is often necessary when working with ion beam sources in higher pressure regimes due to charge transfer effects between the ions of the beam and neutral gas particles. By using electrical fields, the neutral particle filter allows the deflection of charged particles along the bent path of the beamline while the neutral particles of the beam remain unaffected and are guided into a beam dump. By applying no voltage, the neutral particle filter can also be used as a beam dump. Our neutral particle filter is suitable for a wide pressure range, down to ultra-high vacuum (UHV) conditions.



NPF CF 100
NPF CF 100

Special Features:                                                                      

  • aluminum chamber with ConFlat (CF) flange adapter

  • DN100 CF beamline interface flanges

  • DN100 CF and 2 x DN40 CF accessory flanges (e.g. vacuum pump, view port, vacuum gauge, beam dump or Faraday cup installation)

  • 2 pairs of vertical deflection plates

  • superimposing lens system using positive deflection voltage for refocusing purpose

Optional Supplementing Devices:

  • Beam Dump

  • Faraday Cup

  • current measurement device for beam currents of fA up
    to mA



Custom Solutions

Customer specific solution
Customer specific solution

Custom solutions                                                                     

Besides our available Neutral particle filter versions, we also offer development of customer specific solutions. The following paramaters can be modified to perfectly suit your specific requirements:

Maximum deposited beam power

  • up to 30 W with passive cooling

  • higher beam power possible with active cooling solution

Deflection angle

up to 90 degrees

Particle beam energy

Special material selection

up to 30 keV/q, higher beam energy on request

For UHV compatibility, thermal conductivity or sputter resistivity

Mounting flange

DN40 CF up to DN150 CF or ISO-K

Accessory ports

number of ports and port size 

Deflection electrode

distance and length