Electrostatic deflector

Electrostatic deflectors can be used for charged particle beam guidance and deflection as elements of beam optics.

Designed with four electrodes, it allows a deflection of the ion beam in both horizontal and vertical directions.

The electrostatic deflector can be operated in broad pressure ranges, down to ultra-high vacuum conditions.

Electrostatic Deflector CF100

Electrostatic deflector


  • four electrodes enable horizontal and vertical beam deflection for beam position and angle correction or beam scanning
  • refocusing of ion beams by superimposing lens voltages onto both deflector electrodes simultaneously
  • use as a beam scanner in combination with suitable potential control on the deflector electrodes
  • electrode voltage of up to ±10 kV
  • 30 mm distance between electrode segments, other spacing on customer request
  • compact design in one casing thus requiring little space, allowing uncomplicated integration into existing setups
  • electrical feedthroughs for all voltages


  • power supplies for electrodes
  • optional control software
  • further customization possible 

charged particle beam optics

pressure operating range

down to 1·10-10 mbar

maximum electrode voltage

±10 kV

electrode spacing

30 mm

mounting flange

DN100 CF

maximum bakeout temperature

150 °C

approx. box size (length x width x height)

60 mm x 280 mm x 280 mm (DN100 CF flanges)



Electrostatic Deflector - Custom Solutions

Electrostatic deflector with different high voltage feedthrough options.

Besides our readily available electrostatic deflectors, we also offer development of custom solutions to perfectly suit your planned or existing installation.

The following parameters may be customized based on your requirements:

maximum electrode voltage

up to ±10 kV

electrode spacing

default: 30mm

mounting flange

  • DN100 CF
  • DN63 CF
  • Customer specific mounting solutions, shapes and sizes