The 4-Jaw slit system can be used for ion beam diagnostics for the purpose of collimating or blanking the charged particle beam.
Each slit is mounted on a linear feedthrough in order to be individually moved into and out of the beam.
The system is designed for collimating beams of charged particles with currents of a few pA, as well as beams with up to 15 W beam power in broad pressure ranges, down to ultra-high vacuum conditions.
|category||charged particle beam diagnostics|
|maximum beam power||up to 15 W with passive cooling;
higher beam power possible with active cooling
|pressure operating range||down to 1·10-10 mbar|
|travel length||50 mm up to 200 mm, or on customer request|
|mounting flange||DN16 CF up to DN200 CF, or on customer request|
|maximum bakeout temperature||150 °C|
|approx. box size (length x width x height)||270 mm x 900 mm x 900 mm (DN100 CF flanges)|
slit systems of different dimensions available
different travel lengths
each aperture is mounted to a motorized linear feedthrough thus being individually adjustable
manual linear feedthroughs or fixed installation optional
optional readout of charged particle currents on the aperture system with insulated aperture option
optionally highly sputter resistant materials (e.g. tungsten) are available and recommended for use with beams of heavy and/or highly energetic ions
implemented heatsinks for passive cooling
suitable for 4-, 5- or 6-way crosses or cubes of any dimension between DN16 CF and DN200 CF as alternative recipient
Optional Supplementing Devices
- current measurement device for all dimensions of electric current, starting at pA
- active cooling unit for higher thermal loads