4-Jaw slit system

The 4-Jaw slit system can be used for ion beam diagnostics for the purpose of collimating or blanking the charged particle beam.

Each slit is mounted on a linear feedthrough in order to be individually moved into and out of the beam.

The system is designed for collimating beams of charged particles with currents of a few pA, as well as beams with up to 15 W beam power in broad pressure ranges, down to ultra-high vacuum conditions. 

category charged particle beam diagnostics
maximum beam power up to 15 W with passive cooling;
higher beam power possible with active cooling
pressure operating range down to 1·10-10 mbar
travel length 50 mm up to 200 mm, or on customer request
mounting flange DN16 CF up to DN200 CF, or on customer request
maximum bakeout temperature 150 °C
approx. box size (length x width x height) 270 mm x 900 mm x 900 mm (DN100 CF flanges)

Special Features

  • slit systems of different dimensions available
  • different travel lengths
  • each aperture is mounted to a motorized linear feedthrough thus being individually adjustable
  • manual linear feedthroughs or fixed installation optional
  • optional readout of charged particle currents on the aperture system with insulated aperture option
  • optionally highly sputter resistant materials (e.g. tungsten) are available and recommended for use with beams of heavy and/or highly energetic ions
  • implemented heatsinks for passive cooling
  • suitable for 4-, 5- or 6-way crosses or cubes of any dimension between DN16 CF and DN200 CF as alternative recipient

Optional Supplementing Devices

  • current measurement device for all dimensions of electric current, starting at pA
  • active cooling unit for higher thermal loads

Further reading and downloads